The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2023
Filed:
Mar. 31, 2021
Yield Engineering Systems, Inc., Fremont, CA (US);
Mark William Curry, Morgan Hill, CA (US);
Ronald R. Stevens, Pleasanton, CA (US);
Craig W. McCoy, San Jose, CA (US);
Charudatta Galande, Fremont, CA (US);
Gabriel Ormonde, Lathrop, CA (US);
YIELD ENGINEERING SYSTEMS, INC., Fremont, CA (US);
Abstract
A batch processing oven comprising a processing chamber and a rack configured to be positioned in the processing chamber. The rack is configured to support a plurality of substrates and a plurality of panels in a stacked manner such that one or more substrates of the plurality of substrates are positioned between at least one pair of adjacent panels of the plurality panels. Vertical gaps separate each substrate of the one or more substrates from an adjacent substrate or panel on either side of the substrate.