logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11688620 B1

PDFFull Text
Date of Patent:
Jun. 27, 2023

Filed:

Jun. 22, 2022

Shiftless wafer blades

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Chien-Chih Chen, Hsin-Chu, TW;

Yao-Min Yu, Hsin-Chu, TW;

Ching-Ling Lee, Hsin-Chu, TW;

Ren-Dou Lee, Hsinchu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Attorney:

Duane Morris LLP

Primary Examiner:

Dean J Kramer

Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/687 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67766 (2013.01); B25J 11/0095 (2013.01); H01L 21/67742 (2013.01); H01L 21/67778 (2013.01); H01L 21/68707 (2013.01);
Abstract

In an embodiment, a system includes: a cassette comprising a slit opening configured to house a wafer; a blade configured to move the wafer to and from the slit opening by extending into the slit opening, wherein a blade thickness of the blade is at most ⅖ of a height of the slit opening and wherein the blade is configured to secure the wafer within a pocket on the blade that is at least ⅔ of a wafer thickness of the wafer.

Find Patent Forward Citations

Chen, Chien-Chih. (2023). Shiftless wafer blades (U.S. Patent No. 11688620). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11688620

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…