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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11688413 B1

PDFFull Text
Date of Patent:
Jun. 27, 2023

Filed:

Dec. 19, 2019

Method and system for audio recognition of arcing during semiconductor process

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventor:

Chih-Yu Wang, Taichung, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Attorney:

Seed IP Law Group

Primary Examiner:

Paul Kim

Assistant Examiner:

Douglas J Suthers

Int. Cl.
CPC ...
G10L 25/51 (2013.01); G06N 20/00 (2019.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01); H04R 1/40 (2006.01); H04R 3/00 (2006.01); H04R 3/04 (2006.01);
U.S. Cl.
CPC ...
G10L 25/51 (2013.01); G06N 20/00 (2019.01); H01L 21/67017 (2013.01); H01L 21/67253 (2013.01); H01L 22/26 (2013.01); H04R 1/406 (2013.01); H04R 3/007 (2013.01); H04R 3/04 (2013.01);
Abstract

An arcing detection system detects arcing within a semiconductor processing cleanroom environment. The arcing detection system includes an array of microphones positioned within the cleanroom environment. The microphones receive soundwaves within the cleanroom environment and generate audio signals based on the sound waves. The arcing system includes a control system that receives the audio signals from the microphones. The control system analyzes the audio signals and detects arcing within the cleanroom environment based on the audio signals. The control system can adjust a semiconductor process in real time responsive to detecting arcing.

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Wang, Chih-Yu. (2023). Method and system for audio recognition of arcing during semiconductor process (U.S. Patent No. 11688413). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11688413

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