The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2023

Filed:

Oct. 18, 2019
Applicant:

Fujikin Incorporated, Osaka, JP;

Inventors:

Masaaki Nagase, Osaka, JP;

Hidekazu Ishii, Saka, JP;

Kouji Nishino, Osaka, JP;

Nobukazu Ikeda, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/31 (2006.01); G01N 21/85 (2006.01); G01N 33/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
G01N 21/31 (2013.01); G01N 21/85 (2013.01); G01N 33/0037 (2013.01); G01N 2201/1211 (2013.01); G01N 2201/1218 (2013.01); H01L 21/02274 (2013.01);
Abstract

A concentration measurement deviceincludes a light sourcefor generating incident light to a measurement spaceA, a photodetectorfor receiving light emitted from the measurement space, and an arithmetic control circuitfor calculating a concentration of a measurement fluid on the basis of an output of the photodetector, and the light source includes a first light-emitting elementfor generating light having a first wavelength, and a second light-emitting elementfor generating light having a second wavelength, and the concentration measurement device is configured so as to calculate the concentration using either light of the first wavelength or the second wavelength on the basis of the pressure or temperature of the measurement fluid.


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