The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2023
Filed:
Mar. 23, 2021
Applicant:
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Inventors:
Shiro Hara, Tsukuba, JP;
Hitoshi Maekawa, Tsukuba, JP;
Sommawan Khumpuang, Tsukuba, JP;
Takashi Yajima, Tsukuba, JP;
Yuuki Ishida, Tsukuba, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F24F 3/167 (2021.01); F24F 3/04 (2006.01); F24F 11/49 (2018.01); F24F 11/74 (2018.01); F24F 110/30 (2018.01); F24F 110/40 (2018.01);
U.S. Cl.
CPC ...
F24F 3/167 (2021.01); F24F 3/04 (2013.01); F24F 11/49 (2018.01); F24F 11/74 (2018.01); F24F 2110/30 (2018.01); F24F 2110/40 (2018.01);
Abstract
An encapsulated cleanroom system comprising a processing chamber and a storage section in which the processing chamber is stored, wherein, during operation, the pressure in the storage section is lower or higher than the pressures in the processing chamber and exterior space. The system can simultaneously prevent the entry of outside gases into its processing chamber and the leakage of the gases inside the processing chamber to the exterior space.