The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2023
Filed:
Mar. 20, 2019
Applicant:
Obsidian Sensors, Inc., San Diego, CA (US);
Inventors:
John Hong, San Diego, CA (US);
Tallis Chang, San Diego, CA (US);
Edward Chan, San Diego, CA (US);
Bing Wen, San Diego, CA (US);
Yaoling Pan, San Diego, CA (US);
Kenji Nomura, San Diego, CA (US);
Assignee:
Obsidian Sensors, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 7/00 (2006.01); G01J 5/20 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00269 (2013.01); B81B 7/0038 (2013.01); B81C 1/00285 (2013.01); B81C 2203/019 (2013.01); B81C 2203/0118 (2013.01); B81C 2203/035 (2013.01); B81C 2203/05 (2013.01); G01J 5/20 (2013.01);
Abstract
A method of manufacturing MEMS housings includes: providing glass spacers; providing a window plate; attaching the window plate to the glass spacers; aligning the glass spacers with a device glass plate having MEMS devices thereon; bonding the glass spacers to the device glass plate; and singulating the glass spacers, window plate, and device glass plate to produce the MEMS housings.