The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2023
Filed:
Aug. 30, 2021
Tokyo Electron Limited, Tokyo, JP;
Kenichi Kobayashi, Sapporo, JP;
Takehiro Kinoshita, Sapporo, JP;
Takashi Oe, Tokyo, JP;
Noriaki Kanaya, Sapporo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A semiconductor manufacturing system includes: a local operation terminal that displays an apparatus screen of a semiconductor manufacturing apparatus; at least one remote operation terminals that are connected to the semiconductor manufacturing apparatus via a network, and display the apparatus screen; and a controller that controls the semiconductor manufacturing apparatus based on an operation received from a user by the local operation terminal and the remote operation terminal that display the apparatus screen. The control device includes: a login state managing unit; an apparatus screen display state managing unit; and a screen data creating unit that creates screen data of the apparatus screen based on the simultaneous login state and the apparatus screen display state.