The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2023

Filed:

Mar. 05, 2021
Applicant:

J.a. Woollam Co., Inc, Lincoln, NE (US);

Inventors:

Stefan Schoeche, Lincoln, NE (US);

Martin M. Liphardt, Lincoln, NE (US);

Ping He, Lincoln, NE (US);

Jeremy A Van Derslice, Dwight, NE (US);

Craig M. Herzinger, Lincoln, NE (US);

Jeffrey S. Hale, Lincoln, NE (US);

Brian D. Guenther, Lincoln, NE (US);

Duane E. Meyer, Lincoln, NE (US);

John A Woollam, Lincoln, NE (US);

James D. Welch, Omaha, NE (US);

Assignee:

J.A. WOOLLAM CO., INC., Lincoln, NE (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 27/48 (2006.01); G01B 9/02 (2022.01); G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
G02B 27/48 (2013.01); G01B 9/02084 (2013.01); G01B 11/24 (2013.01);
Abstract

Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.


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