The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Oct. 02, 2019
Globalfoundries U.s. Inc., Santa Clara, CA (US);
Vincent J. McGahay, Poughkeepsie, NY (US);
Bhupesh Chandra, New York, NY (US);
GLOBALFOUNDRIES U.S. INC., Malta, NY (US);
Abstract
An artificially oriented piezoelectric films for integrated filters and methods of manufacture. The method includes: forming a piezoelectric film with effective crystalline orientations of a polar axis rotated 90 degrees from a natural orientation for planar deposited piezoelectric films; and forming electrodes on a planar surface of the piezoelectric film. The piezoelectric film has an effective crystalline orientation of the polar axis in a horizontal orientation, with respect to the electrodes, and an effective crystalline orientation of the polar axis in a vertical direction adjacent to an underlying substrate.