The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Jul. 27, 2017
Shibaura Mechatronics Corporation, Yokohama, JP;
Konosuke Hayashi, Yokohama, JP;
Kunihiro Miyazaki, Yokohama, JP;
SHIBAURA MECHATRONICS CORPORATION, Yokohama, JP;
Abstract
According to one embodiment, a processing liquid generator capable of improving the reliability of the concentration of generated processing liquid is provided. A processing liquid generator that generates processing liquid having undergone concentration adjustment includes a processing liquid adjuster (), which adjusts the concentration of the processing liquid, a first processing liquid path P, through which the processing liquid flows to the processing liquid adjuster (), a second processing liquid path P, through which the processing liquid flows to the processing liquid adjuster, a first concentration meter, which measures the concentration of the processing liquid flowing through the first processing liquid path P, the measured concentration being the concentration of a component involved in the concentration adjustment in the processing liquid adjuster (), a second concentration meter, which measures the concentration of the processing liquid flowing through the second processing liquid path P, the measured concentration being the concentration of a component that is involved in the concentration adjustment and should be measured with the first concentration meterin terms of concentration, a first valve mechanism, which opens and closes the first processing liquid path P, and a second valve mechanism, which opens and closes the second processing liquid path P