The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Sep. 27, 2017
Applicant:
Bruker Nano, Inc., Santa Barbara, CA (US);
Inventors:
Emad Zawaideh, Carlsbad, CA (US);
Chris Claypool, Carlsbad, CA (US);
Assignee:
BRUKER NANO, INC., Santa Barbara, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/21 (2006.01); G01N 21/31 (2006.01); G01J 3/447 (2006.01); G02B 27/28 (2006.01); G02B 21/18 (2006.01); G02B 21/26 (2006.01);
U.S. Cl.
CPC ...
G01N 21/211 (2013.01); G01J 3/447 (2013.01); G01N 21/31 (2013.01); G02B 21/18 (2013.01); G02B 21/26 (2013.01); G02B 27/283 (2013.01); G01N 2021/213 (2013.01); G01N 2021/216 (2013.01); G01N 2201/0683 (2013.01);
Abstract
A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.