The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Jan. 28, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Sathyendra Ghantasala, Fremont, CA (US);
Leonid Dorf, San Jose, CA (US);
Evgeny Kamenetskiy, Santa Clara, CA (US);
Peter Muraoka, Santa Clara, CA (US);
Denis M. Koosau, Pleasanton, CA (US);
Rajinder Dhindsa, Pleasanton, CA (US);
Andreas Schmid, Meyriez, CH;
Applied Materials Inc., Santa Clara, CA (US);
Abstract
Disclosed herein is a method and apparatus for controlling surface characteristics by measuring capacitance of a process kit ring. The method includes interfacing a ring with a jig assembly for measuring capacitance in at least a first location of the ring. The ring has that includes a top surface, a bottom surface, and an inner surface opposite an outer surface. At least the bottom surface has an external coating placed thereon. The method further includes contacting a measuring device to the first location on the outer surface proximate the bottom surface. The measuring device contacts an opening in the external coating to the body. The measuring device contacts a first conductive member that is electrically coupled to the ring. A capacitance is measured on the measuring device. The capacitance across the top surface is measured.