The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Mar. 21, 2022
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Inventors:
Yung-Chang Huang, Taichung, TW;
You-Fu Chen, Yunlin County, TW;
Yu-Chi Tsai, Hsinchu, TW;
Chu-Ting Chang, Taichung, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 21/14 (2006.01); H01L 21/288 (2006.01); C25D 3/38 (2006.01); C25D 7/12 (2006.01); C25D 21/08 (2006.01); C25D 21/18 (2006.01);
U.S. Cl.
CPC ...
C25D 21/14 (2013.01); C25D 3/38 (2013.01); C25D 7/12 (2013.01); C25D 21/08 (2013.01); C25D 21/18 (2013.01); H01L 21/2885 (2013.01);
Abstract
A method of controlling chemical concentration in electrolyte includes measuring a chemical concentration in an electrolyte, wherein the electrolyte is contained in a tank; and increasing a vapor flux through an exhaust pipe connected to the tank when the measured chemical concentration is lower than a control lower limit value.