The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Apr. 15, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jennifer Y. Sun, Mountain View, CA (US);
David Fenwick, Los Altos Hills, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/30 (2006.01); C04B 35/505 (2006.01); C04B 35/638 (2006.01); C04B 35/622 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); C04B 35/645 (2006.01); H01L 21/687 (2006.01); C23C 30/00 (2006.01); C04B 41/00 (2006.01);
U.S. Cl.
CPC ...
C04B 35/505 (2013.01); C04B 35/62222 (2013.01); C04B 35/638 (2013.01); C04B 35/645 (2013.01); C04B 41/00 (2013.01); C23C 30/00 (2013.01); H01J 37/32495 (2013.01); H01J 37/32724 (2013.01); H01L 21/67069 (2013.01); H01L 21/67103 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/604 (2013.01); C04B 2235/612 (2013.01); C04B 2235/656 (2013.01); C04B 2235/662 (2013.01); C04B 2235/72 (2013.01); C04B 2235/77 (2013.01); C04B 2235/786 (2013.01); C04B 2235/94 (2013.01); C04B 2235/95 (2013.01); C04B 2235/96 (2013.01); C04B 2235/9607 (2013.01); C04B 2235/9661 (2013.01); C04B 2235/9669 (2013.01);
Abstract
A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a YO—ZrOpowder consisting essentially of 55-65 mol % YOand 35-45 mol % ZrO; and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of YO—ZrO, the sintered ceramic body consisting essentially of 55-65 mol % YOand 35-45 mol % ZrO.