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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11664260 B1

PDFFull Text
Date of Patent:
May. 30, 2023

Filed:

Apr. 09, 2021

Systems and methods for orientator based wafer defect sensing

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Yan-Hong Liu, Zhudong Township, Hsinchu County, TW;

Daniel M. Y. Yang, Hsin-Chu, TW;

Che-Fu Chen, Hsin-Chu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Attorney:

Duane Morris LLP

Primary Examiner:

Tarifur R Chowdhury

Assistant Examiner:

Omar H Nixon

Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/687 (2006.01); G01N 21/95 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); G01N 21/9503 (2013.01); G01N 21/9505 (2013.01); H01L 21/67288 (2013.01); H01L 21/68707 (2013.01); H01L 21/68764 (2013.01);
Abstract

In an embodiment, a system includes: an orientation sensor configured to detect an orientation fiducial on a bevel of a wafer; a pedestal configured to rotate the wafer to allow the orientation sensor to detect the orientation fiducial and place the orientation fiducial at a predetermined orientation position; and a defect sensor configured to detect a wafer defect along a surface of the wafer while rotated by the pedestal.

Find Patent Forward Citations

Liu, Yan-Hong. (2023). Systems and methods for orientator based wafer defect sensing (U.S. Patent No. 11664260). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11664260

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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