The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 30, 2023

Filed:

Mar. 01, 2021
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Avishek Ghosh, Thane West, IN;

Byung-Sung Kwak, Portland, OR (US);

Todd Egan, Fremont, CA (US);

Robert Jan Visser, Menlo Park, CA (US);

Gangadhar Banappanavar, Mumbai, IN;

Dinesh Kabra, Mumbai, IN;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/64 (2006.01); H01L 51/52 (2006.01);
U.S. Cl.
CPC ...
G01N 21/6489 (2013.01); G01N 21/6408 (2013.01); H01L 51/5287 (2013.01);
Abstract

An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.


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