The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 30, 2023

Filed:

May. 24, 2021
Applicant:

Ostendo Technologies, Inc., Carlsbad, CA (US);

Inventors:

Alexander L. Syrkin, Montgomery Village, MD (US);

Vladimir Ivantsov, Hyattsville, MD (US);

Alexander Usikov, Rockville, MD (US);

Vladimir A. Dmitriev, Gaithersburg, MD (US);

Assignee:

Ostendo Technologies, Inc., Carlsbad, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/08 (2006.01); C30B 25/16 (2006.01); H01L 21/02 (2006.01); C30B 29/68 (2006.01); C30B 29/40 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
C30B 25/08 (2013.01); C30B 25/165 (2013.01); C30B 29/403 (2013.01); C30B 29/68 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 29/2003 (2013.01);
Abstract

Hydride phase vapor epitaxy (HVPE) growth apparatus, methods and materials and structures grown thereby. An HVPE reactor includes generation, accumulation, and growth zones. A source material for growth of indium nitride is generated and collected inside the reactor. A first reactive gas reacts with an indium source inside the generation zone to produce a first gas product having an indium-containing compound. The first gas product is cooled and condenses into a liquid or solid condensate or source material having an indium-containing compound. The source material is collected in the accumulation zone. Vapor or gas resulting from evaporation of the condensate forms a second gas product, which reacts with a second reactive gas in the growth zone for growth of indium nitride.


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