The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Jul. 14, 2021
Ebara Corporation, Tokyo, JP;
Kazuma Ideguchi, Tokyo, JP;
Shugo Midorikawa, Tokyo, JP;
Yosuke Nagasawa, Tokyo, JP;
Tensei Sato, Tokyo, JP;
Hideki Wakabayashi, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
Provided is a technique configured to cause a first actual operation to be started in a short time when the actual operation of a substrate processing component group is performed a plurality of times. A substrate processing systemincludes a substrate processing apparatushaving a substrate processing component groupand a controller. The substrate processing component groupis configured to perform a test operation and an actual operation. The substrate processing component grouphas a first substrate processing component and a second substrate processing component. When the actual operation is performed a plurality of times, the controllercauses the first substrate processing component to perform the test operation and causes the actual operation of the first substrate processing component to be started after completion of the test operation of the first substrate processing component.