The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2023
Filed:
Apr. 11, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Pingyan Lei, San Jose, CA (US);
Dien-Yeh Wu, San Jose, CA (US);
Xiao Ming He, Santa Clara, CA (US);
Jennifer Y. Sun, Fremont, CA (US);
Lei Zhou, San Jose, CA (US);
Takashi Kuratomi, Campbell, CA (US);
Avgerinos V. Gelatos, Scotts Valley, CA (US);
Mei Chang, Santa Clara, CA (US);
Steven D. Marcus, San Jose, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods and apparatus for depositing a coating on a semiconductor manufacturing apparatus component are provided herein. In some embodiments, a method of depositing a coating on a semiconductor manufacturing apparatus component includes: sequentially exposing a semiconductor manufacturing apparatus component including nickel or nickel alloy to an aluminum precursor and a reactant to form an aluminum containing layer on a surface of the semiconductor manufacturing apparatus component by a deposition process.