The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2023

Filed:

Sep. 10, 2021
Applicant:

National University of Defense Technology, People's Liberation Army of China, Hunan, CN;

Inventors:

Ye Tian, Hunan, CN;

Feng Shi, Hunan, CN;

Guangqi Zhou, Hunan, CN;

Ci Song, Hunan, CN;

Guipeng Tie, Hunan, CN;

Gang Zhou, Hunan, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/304 (2006.01); H01J 37/305 (2006.01);
U.S. Cl.
CPC ...
H01J 37/304 (2013.01); H01J 37/305 (2013.01); H01J 2237/2487 (2013.01);
Abstract

The present disclosure provides a system and method for controlling a dynamically controllable ultrawide-amplitude and high-response ion source, including: resolving dwell time of ion beam machining during iterative machining; selecting an appropriate velocity V of a movable shaft of a machine tool according to a calculation result of the dwell time; and dynamically calculating process parameters of an ion source according to an initial surface error of an optical component and the velocity V of the movable shaft, and generating a corresponding numerical control (NC) program to machine the optical component. The present disclosure can control the removal function of the ion beam polishing in real time, improve the precision and efficiency of the ion beam polishing, and further reduce the requirement on a movement system of the machine tool and the depth of a damaged layer.


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