The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2023
Filed:
Sep. 20, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Adam Lyons, Albany, NY (US);
Thomas I. Wallow, San Carlos, CA (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/04 (2006.01); H01J 37/147 (2006.01); G01N 23/06 (2018.01); G01N 23/203 (2006.01); G01N 23/2251 (2018.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); G01N 23/06 (2013.01); G01N 23/203 (2013.01); G01N 23/2251 (2013.01); H01J 37/045 (2013.01); H01J 37/1474 (2013.01);
Abstract
A method for scanning a sample by a charged particle beam tool is provided. The method includes providing the sample having a scanning area including a plurality of unit areas, scanning a unit area of the plurality of unit areas, blanking a next unit area of the plurality of unit areas adjacent to the scanned unit area, and performing the scanning and the blanking the plurality of unit areas until all of the unit areas are scanned.