The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2023
Filed:
Nov. 02, 2020
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Masahito Yahagi, Kawasaki, JP;
Yoichi Hori, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Abstract
A resist composition including a resin component (A1) having a structural unit (a01), a structural unit (a02) and a structural unit (a03) derived from compounds represented by general formulae (a01-1), (a02-1) and (a03-1), respectively (Wrepresents a polymerizable group-containing group containing no oxygen; Wrepresents a polymerizable group-containing group containing oxygen; Wrepresents a polymerizable group-containing group which may contain oxygen; Waand Warepresent an aromatic hydrocarbon group; Xarepresents a group which forms an alicyclic hydrocarbon group together with Ya; Rarepresents a hydrocarbon group which may have a substituent)