The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2023

Filed:

Sep. 10, 2021
Applicant:

Rigaku Corporation, Akishima, JP;

Inventors:

Shinya Hara, Takatsuki, JP;

Yasujiro Yamada, Takatsuki, JP;

Hisashi Homma, Nara, JP;

Assignee:

Rigaku Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/223 (2006.01);
U.S. Cl.
CPC ...
G01N 23/223 (2013.01); G01N 2223/61 (2013.01); G01N 2223/633 (2013.01);
Abstract

An X-ray fluorescence spectrometer of the present invention includes: a determination module () configured to determine, with respect to every one of measurement lines that correspond to secondary X-rays having intensities to be measured, whether or not a ratio of a theoretical intensity in thin film calculated on the basis of an assumed thickness and known contents of respective components to a theoretical intensity in bulk calculated on the basis of the known contents of the respective components exceeds a predetermined threshold; and a saturation thickness quantification module () configured to, according to a positive determination by the determination module (), calculate a saturation thickness with respect to each of the measurement lines, at which the theoretical intensity saturates, on the basis of the known contents of the respective components and to adopt a largest saturation thickness as a quantitative value of a thickness.


Find Patent Forward Citations

Loading…