The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2023
Filed:
Nov. 20, 2020
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
Gerardo A. Brucker, Longmont, CO (US);
Timothy C. Swinney, Fort Collins, CO (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/02 (2006.01); G01L 9/00 (2006.01); G01L 21/10 (2006.01); G01L 21/14 (2006.01); G01L 21/12 (2006.01);
U.S. Cl.
CPC ...
G01L 9/025 (2013.01); G01L 9/00 (2013.01); G01L 9/0002 (2013.01); G01L 21/10 (2013.01); G01L 21/14 (2013.01);
Abstract
A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.