The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2023

Filed:

Dec. 27, 2019
Applicant:

Toppan Printing Co., Ltd., Tokyo, JP;

Inventors:

Kengo Okamura, Tokyo, JP;

Ken Takahara, Tokyo, JP;

Takahiro Hayakawa, Tokyo, JP;

Michihiro Hanami, Tokyo, JP;

Takayuki Tani, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/35 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3405 (2013.01); C23C 14/35 (2013.01); H01J 37/32568 (2013.01); H01J 37/345 (2013.01); H01J 2237/20221 (2013.01); H01J 2237/332 (2013.01);
Abstract

A treatment method performed by a film processing apparatus including: a first discharge electrode unit and a second discharge electrode unit respectively including magnets that form a magnetic field; and an AC power source capable of alternately switching polarities of the first discharge electrode unit and the second discharge electrode unit. In the treatment method, a predetermined surface treatment of a film F is performed by generating a plasma P while alternately switching polarities of the first discharge electrode unit and the second discharge electrode unit by using high-frequency power supplied from the AC power source.


Find Patent Forward Citations

Loading…