The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2023

Filed:

Jun. 22, 2022
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Kun Liu, Portland, OR (US);

Chad Rue, North Plains, OR (US);

Alan Stephen Bahm, Hillsboro, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/073 (2006.01); H01J 1/304 (2006.01); H01J 1/34 (2006.01); H01J 19/24 (2006.01);
U.S. Cl.
CPC ...
H01J 1/3044 (2013.01); H01J 1/34 (2013.01); H01J 19/24 (2013.01); H01J 37/073 (2013.01); H01J 2201/30415 (2013.01); H01J 2201/30449 (2013.01); H01J 2237/06341 (2013.01);
Abstract

Methods of producing microrods for electron emitters and associated microrods and electron emitters. In one example, a method of producing a microrod for an electron emitter comprises providing a bulk crystal ingot, removing a first plate from the bulk crystal ingot, reducing a thickness of the first plate to produce a second plate, and milling the second plate to produce one or more microrods. In another example, a microrod for an electron emitter comprises a microrod tip region that comprises a nanoneedle that in turn comprises a nanorod and a nanoprotrusion tip. The microrod and the nanoneedle are integrally formed from a bulk crystal ingot by sequentially: (i) removing the microrod from the bulk crystal ingot; (ii) coarse processing the microrod tip region to produce the nanorod; and (iii) fine processing the nanorod to produce the nanoprotrusion tip.


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