The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2023
Filed:
Jan. 15, 2018
Asml Netherlands B.v., AH Veldhoven, NL;
Wei Fang, Milpitas, CA (US);
Cho Huak Teh, Hsinchu, TW;
Robeter Jian, Hsinchu, TW;
Yi-Ying Wang, Hsinchu, TW;
Shih-Tsung Chen, Hsinchu, TW;
Jian-Min Liao, Hsinchu, TW;
Chuan Li, San Jose, CA (US);
Zhaohui Guo, San Jose, CA (US);
Pang-Hsuan Huang, Hsinchu, TW;
Shao-Wei Lai, Hsinchu, TW;
Shih-Tsung Hsu, Hsinchu, TW;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A server for knowledge recommendation for defect review. The server includes a processor electronically coupled to an electronic storage device storing a plurality of knowledge files related to wafer defects. The processor is configured to execute a set of instruction to cause the server to: receive a request for knowledge recommendation for inspecting an inspection image from a defect classification server; search for a knowledge file in the electronic storage device that matches the inspection image; and transmit the search result to the defect classification server.