The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2023
Filed:
Mar. 04, 2021
Method for detector equalization during the imaging of objects with a multi-beam particle microscope
Applicant:
Carl Zeiss Multisem Gmbh, Oberkochen, DE;
Inventors:
Dirk Zeidler, Oberkochen, DE;
Michael Behnke, Eislingen, DE;
Stefan Schubert, Oberkochen, DE;
Christof Riedesel, Aalen, DE;
Assignee:
Carl Zeiss MultiSEM GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 5/00 (2006.01); H01J 37/00 (2006.01); G06T 5/40 (2006.01); G06T 5/50 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
G06T 5/009 (2013.01); G06T 5/40 (2013.01); G06T 5/50 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); G06T 2207/10061 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/24445 (2013.01); H01J 2237/2811 (2013.01);
Abstract
A method for detector equalization during the imaging of objects with a multi-beam particle microscope includes performing an equalization on the basis of individual images in or on the basis of overlap regions. For detector equalization, contrast values and/or brightness values are used and iterative methods can be employed.