The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2023
Filed:
Jan. 09, 2020
Applicant:
Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;
Inventors:
Kentaro Miyano, Osaka, JP;
Naoya Ryoki, Osaka, JP;
Akihiko Ishibashi, Osaka, JP;
Masaki Nobuoka, Nara, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/22 (2006.01); C30B 15/20 (2006.01);
U.S. Cl.
CPC ...
C30B 29/22 (2013.01); C30B 15/20 (2013.01);
Abstract
A ScAlMgOmonocrystalline substrate that is highly cleavable and that does not easily cause cracking in the GaN film id grown on the substrate and a method for manufacturing such a ScAlMgOmonocrystalline substrate are provided. The ScAlMgOmonocrystalline substrate has a crystal oxygen concentration of 57 atom % or less as measured by inductively coupled plasma atomic emission spectroscopy analysis.