The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2023
Filed:
Jul. 15, 2020
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Tomohiro Kubota, Hachioji, JP;
Mitsuya Utsuno, Tachikawa, JP;
Toshihisa Nozawa, Kawasaki, JP;
Seiji Samukawa, Sendai, JP;
Hua Hsuan Chen, Sendai, JP;
Assignee:
ASM IP Holding B.V., Versterkerstraat, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H05H 3/02 (2006.01); C23C 16/40 (2006.01); C23C 16/48 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45536 (2013.01); C23C 16/402 (2013.01); C23C 16/45553 (2013.01); C23C 16/486 (2013.01); H05H 3/02 (2013.01);
Abstract
Methods of forming structures using a neutral beam, structures formed using a neutral beam, and reactor systems for forming the structures are disclosed. The neutral beam can be used to provide activated species during deposition of a layer and/or to provide activated species to treat a deposited layer.