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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11640918 B1

PDFFull Text
Date of Patent:
May. 02, 2023

Filed:

Feb. 10, 2021

Stage device, power supply mechanism, and processing apparatus

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Satoshi Takeda, Nirasaki, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Fenwick & West LLP

Primary Examiner:

Jason Berman

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 43/08 (2006.01); H01L 43/12 (2006.01); H01J 37/34 (2006.01); H01J 37/32 (2006.01); C23C 14/35 (2006.01); C23C 14/50 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); C23C 14/35 (2013.01); C23C 14/50 (2013.01); H01J 37/32724 (2013.01); H01J 37/32834 (2013.01); H01J 37/3426 (2013.01); H01L 21/67103 (2013.01); H01L 43/08 (2013.01); H01L 43/12 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/332 (2013.01);
Abstract

A stage device includes a stage having a copper main body and an electrostatic chuck, a cooling unit disposed below the stage, and a power supply mechanism for supplying power to an attraction electrode of the electrostatic chuck from a DC power supply disposed below the stage. The power supply mechanism includes a pair of terminals disposed at an outer peripheral portion of the stage while being spaced apart from each other, a first power supply line having a pair of metal rods spaced apart from each other while extending toward the stage and being connected to the DC power supply, a second power supply line having a pair of metal rods spaced apart from each other and connected to the terminals, and a connecting unit where the metal rods of the first power supply line and the metal rods of the second power supply line are connected.

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