The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2023
Filed:
Dec. 09, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Kenta Saiki, Yamanashi, JP;
Takuya Ishida, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 3/00 (2006.01); G01R 31/28 (2006.01); G06T 7/00 (2017.01); G01N 21/95 (2006.01); G01N 21/94 (2006.01); G06T 7/73 (2017.01);
U.S. Cl.
CPC ...
G01R 3/00 (2013.01); G01N 21/94 (2013.01); G01N 21/9501 (2013.01); G01R 31/2831 (2013.01); G06T 7/001 (2013.01); G06T 7/74 (2017.01);
Abstract
A method of detecting a foreign object on a stage according to one aspect of the present disclosure includes acquiring first position information of a first pattern included in a first image in a reference state of a surface of the stage capable of attracting an object to be inspected; acquiring second position information of a second pattern included in a second image of the surface, the second image being obtained after obtaining the first image; and detecting one or more foreign objects on the surface by comparing the first position information and the second position information.