The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Aug. 18, 2022
Kla Corporation, Milpitas, CA (US);
Sumeet Kumar, San Jose, CA (US);
Joshua Wittenberg, Fremont, CA (US);
Mark S. Wang, San Ramon, CA (US);
Rajkeshar Singh, Milpitas, CA (US);
Yoshio Kagebayashi, Milpitas, CA (US);
Shinichiro Nozaki, Milpitas, CA (US);
KLA CORPORATION, Milpitas, CA (US);
USHIO, INC., Tokyo, JP;
Abstract
A plasma lamp for use in a broadband plasma source of an inspection tool is disclosed. The plasma lamp includes a plasma bulb configured to contain a gas and generate a plasma within the plasma bulb. The plasma bulb is formed from a material at least partially transparent to illumination from a pump laser and at least a portion of broadband radiation emitted by the plasma. The plasma bulb includes a conical pocket. The conical pocket is configured to disrupt a plume rising from the plasma.