The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Apr. 14, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Alexander N. Lerner, San Jose, CA (US);
Michael P. Karazim, San Jose, CA (US);
Andrew J. Constant, Cupertino, CA (US);
Jeffrey A. Brodine, Los Gatos, CA (US);
Kim Ramkumar Vellore, San Jose, CA (US);
Kevin Moraes, Mountain View, CA (US);
Roey Shaviv, Palo Alto, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An alignment module for housing and cleaning masks. The alignment module comprises a mask stocker, a cleaning chamber, an alignment chamber, an alignment stage a transfer robot. The mask stocker is configured to house a mask cassette configured to store a plurality of masks. The cleaning chamber is configured to clean the plurality of masks by providing one or more cleaning gases into a chamber after a mask is inserted into the cleaning chamber. The alignment stage is configured to support a carrier and a substrate. The transfer robot is configured to transfer a mask from one or more of the alignment stage and the mask stocker to the cleaning chamber.