The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Mar. 05, 2018
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 29/393 (2006.01); H01L 21/67 (2006.01); B05C 11/10 (2006.01); B41J 3/407 (2006.01); H05B 33/10 (2006.01); B41J 11/42 (2006.01); B05B 12/08 (2006.01); H01L 51/00 (2006.01); B41J 25/00 (2006.01); B41J 11/46 (2006.01); B41J 2/045 (2006.01); B05C 5/02 (2006.01); B29C 64/112 (2017.01);
U.S. Cl.
CPC ...
B41J 29/393 (2013.01); B05B 12/084 (2013.01); B05C 11/1005 (2013.01); B05C 11/1015 (2013.01); B05C 11/1034 (2013.01); B41J 2/04505 (2013.01); B41J 3/407 (2013.01); B41J 11/42 (2013.01); B41J 11/46 (2013.01); B41J 25/001 (2013.01); H01L 21/6715 (2013.01); H01L 51/0005 (2013.01); H05B 33/10 (2013.01); B05C 5/0216 (2013.01); B29C 64/112 (2017.08); B41J 2029/3935 (2013.01); H01L 21/67259 (2013.01);
Abstract
A control unit obtains a captured image of a reference workpiece by a second image capturing unit after a droplet ejected from a droplet ejecting head lands toward a reference mark formed on an upper surface of the reference workpiece, detects a positional deviation amount of a position of the reference mark and a landing position of the droplet based on the captured image, and calculates the correction amounts of the relative positions of a workpiece table and a droplet ejecting head based on the positional deviation amount.