The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2023
Filed:
Oct. 29, 2019
Tokyo Electron Limited, Tokyo, JP;
Tsunenaga Nakashima, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
In a chemical liquid container replacement device Dconfigured to replace a chemical liquid container, multiple chemical liquid containersrespectively connected to base end sides of chemical liquid supply paths configured to supply chemical liquids, and a nozzle attachment/detachment deviceis configured to attach/detach the base end side of the chemical liquid supply path with respect to the chemical liquid containerof a container arrangement section. A loading/unloading portloads a new chemical liquid containerfor performing a liquid process on a substrate W and unloads a completely used chemical liquid container. A container transfer deviceunloads the completely used chemical liquid containerfrom the container arrangement sectiontoward the loading/unloading portand loads the new chemical liquid containersfrom the loading/unloading porttoward the container arrangement section