The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2023
Filed:
Jul. 17, 2019
Applicant:
Massachusetts Institute of Technology, Cambridge, MA (US);
Inventors:
Vladimir Bulovic, Lexington, MA (US);
Maximilian Hoerantner, Cambridge, MA (US);
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01L 51/00 (2006.01); C23C 16/30 (2006.01); H01L 51/42 (2006.01);
U.S. Cl.
CPC ...
C23C 16/455 (2013.01); C23C 16/30 (2013.01); H01L 51/001 (2013.01); H01L 51/4213 (2013.01);
Abstract
Disclosed are vapor transport deposition systems and methods for alternating sequential vapor transport deposition of multi-component perovskite thin-films. The systems include multiple vaporizing sources that are mechanically or digitally controlled for high throughput deposition. Alternating sequential deposition provides faster sequential deposition, and allows for reduced material degradation due to different vapor temperatures.