The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2023
Filed:
Sep. 29, 2020
Applicant:
Ulvac, Inc., Chigasaki, JP;
Inventors:
Assignee:
ULVAC, Inc., Chigasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 9/16 (2006.01); B25J 15/00 (2006.01); B25J 13/08 (2006.01);
U.S. Cl.
CPC ...
B25J 9/1651 (2013.01); B25J 9/163 (2013.01); B25J 13/088 (2013.01); B25J 15/0014 (2013.01);
Abstract
A substrate transport device includes an arm, an end effector coupled to the arm, a driver configured to lift the arm so that the end effector receives a substrate, and a controller configured to control an output of the driver to change a lifting speed of the arm. While lifting the arm at a first speed to lift the end effector toward the substrate, the controller changes the lifting speed to a second speed that is lower than the first speed when the end effector starts to raise a height position of the substrate.