The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 11, 2023

Filed:

Jan. 20, 2021
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Yoshimasa Kojima, Tokyo, JP;

Atsushi Kubo, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/67 (2006.01); B23K 26/38 (2014.01); H04N 7/18 (2006.01); H04N 5/262 (2006.01); H04N 23/90 (2023.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); B23K 26/38 (2013.01); H01L 21/67092 (2013.01); H01L 21/67115 (2013.01); H04N 5/2628 (2013.01); H04N 7/18 (2013.01); H04N 23/90 (2023.01); H04N 5/2624 (2013.01);
Abstract

A processing apparatus includes a chuck table including a plate-shaped holding component having a predetermined region transparent from one surface to the other surface, a processing unit that processes a workpiece, a first imaging unit disposed over the chuck table to acquire a normal image of the back surface side, and a second imaging unit disposed under the chuck table to acquire a normal image of the front surface side, a display device, and a control part that executes image processing of the normal image of either the back or front surface side to cause the normal image subjected to the image processing to be displayed on the display device in the state of being inverted in a predetermined direction in order to allow the orientation of the normal image of the back surface side to correspond with the orientation of the normal image of the front surface side.


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