The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2023
Filed:
Aug. 06, 2019
Kla Corporation, Milpitas, CA (US);
David Jalil Zare, San Jose, CA (US);
Eduardo Soto, Patterson, CA (US);
I-Fan Wu, Fremont, CA (US);
Joseph Walsh, Soquel, CA (US);
Kent McKernan, San Jose, CA (US);
Joseph Armstrong, Fremont, CA (US);
Christopher Davis, San Rafael, CA (US);
Garry Rose, Livermore, CA (US);
Damon Kvamme, Los Gatos, CA (US);
Bernd Burfeindt, Los Gatos, CA (US);
Ali Ehsani, San Ramon, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
An enclosure surrounding the optical component can be connected with a vapor source. The vapor source can provide a vapor to the enclosure with a vapor level from 500 ppm to 15000 ppm. The concentration of vapor in the enclosure can increase the lifespan of the optical component in the enclosure.