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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11621201 B1

PDFFull Text
Date of Patent:
Apr. 04, 2023

Filed:

Dec. 07, 2020

Laser beam spot shape correcting method

Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Atsushi Ueki, Tokyo, JP;

Teppei Nomura, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer Burns & Crain Ltd.

Primary Examiner:

Vu A Vu

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/66 (2006.01); G02B 19/00 (2006.01); G02B 27/09 (2006.01); G02B 27/00 (2006.01); G02B 5/10 (2006.01); H01L 21/268 (2006.01); H01L 21/78 (2006.01); B23K 26/03 (2006.01); B23K 26/073 (2006.01); B23K 26/53 (2014.01); B23K 103/00 (2006.01); G02F 1/1362 (2006.01);
U.S. Cl.
CPC ...
H01L 22/20 (2013.01); B23K 26/032 (2013.01); B23K 26/073 (2013.01); B23K 26/53 (2015.10); G02B 5/10 (2013.01); G02B 19/0009 (2013.01); G02B 19/0085 (2013.01); G02B 27/0068 (2013.01); G02B 27/0927 (2013.01); H01L 21/268 (2013.01); H01L 21/67092 (2013.01); H01L 21/67115 (2013.01); H01L 21/67253 (2013.01); H01L 21/78 (2013.01); B23K 2103/56 (2018.08); G02F 1/136277 (2013.01); G02F 2203/12 (2013.01); G02F 2203/50 (2013.01);
Abstract

A laser beam spot shape correcting method includes a laser beam irradiating step of irradiating a concave mirror with a laser beam, an imaging step of imaging reflected light by a beam profiler, an image forming step of forming an XZ plane image or a YZ plane image from an XY plane image imaged in the imaging step, and a comparing step of comparing the image formed in the image forming step with an XZ plane image or a YZ plane image of an ideal laser beam. A phase pattern displayed on a display unit of a spatial light modulator is changed such that the XZ plane image or the YZ plane image formed in the image forming step coincides with the XZ plane image or the YZ plane image of the ideal laser beam.

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