The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2023
Filed:
Aug. 18, 2020
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Yongfeng Ni, Waalre, NL;
Ronald Franciscus Herman Hugers, Best, NL;
Andreas Johannes Antonius Brouns, Eindhoven, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 (2006.01); G03F 7/20 (2006.01); G02B 7/02 (2021.01); G02B 27/30 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7026 (2013.01); G02B 7/023 (2013.01); G02B 7/026 (2013.01); G02B 27/30 (2013.01); G03F 7/7065 (2013.01); G03F 7/70625 (2013.01); G03F 7/70566 (2013.01);
Abstract
An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.