The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2023
Filed:
Mar. 10, 2020
Applicant:
Gigaphoton Inc., Tochigi, JP;
Inventors:
Osamu Wakabayashi, Oyama, JP;
Yoshiyuki Honda, Oyama, JP;
Assignee:
Gigaphoton Inc., Tochigi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/08 (2006.01); G03F 1/24 (2012.01); G03F 1/52 (2012.01); G03F 1/58 (2012.01); G21K 1/06 (2006.01);
U.S. Cl.
CPC ...
G02B 5/0891 (2013.01); G03F 1/24 (2013.01); G03F 1/52 (2013.01); G03F 1/58 (2013.01); G21K 1/062 (2013.01);
Abstract
A mirror for extreme ultraviolet light includes: a substrate (); a multilayer film () provided on the substrate and configured to reflect extreme ultraviolet light; and a capping layer () provided on the multilayer film, and the capping layer includes a first layer () containing an oxide of a metal, and a second layer () arranged between the first layer and the multilayer film and containing at least one of a boride of the metal and a nitride of the metal.