The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2023
Filed:
Jun. 09, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Uma Sridhar, Sunnyvale, CA (US);
Sivapackia Ganapathiappan, Los Altos, CA (US);
Ashwin Murugappan Chockalingam, San Jose, CA (US);
Mayu Felicia Yamamura, San Carlos, CA (US);
Daniel Redfield, Morgan Hill, CA (US);
Rajeev Bajaj, Fremont, CA (US);
Yingdong Luo, Newark, CA (US);
Nag B. Patibandla, Pleasanton, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Interpenetrating polymer networks (IPNs) for a forming polishing pad for a semiconductor fabrication operation are disclosed. Techniques for forming the polishing pads are provided. In an exemplary embodiment, a polishing pad includes an interpenetrating polymer network formed from a free-radically polymerized material and a cationically polymerized material.