The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2023
Filed:
Feb. 03, 2021
Applicant:
Ebara Corporation, Tokyo, JP;
Inventor:
Kiyoshi Suzuki, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/04 (2006.01); C25D 17/06 (2006.01); C25D 17/10 (2006.01); B08B 11/02 (2006.01); B08B 3/02 (2006.01); B08B 1/04 (2006.01); C25D 21/00 (2006.01); C11D 7/26 (2006.01);
U.S. Cl.
CPC ...
B08B 3/04 (2013.01); B08B 1/04 (2013.01); B08B 3/02 (2013.01); B08B 11/02 (2013.01); C11D 7/265 (2013.01); C25D 17/06 (2013.01); C25D 17/10 (2013.01); C25D 21/00 (2013.01);
Abstract
There is provided a cleaning method and a cleaning apparatus capable of removing dirt on electrical contacts, the dirt being unable to be removed with deionized water, without adversely affecting a plating solution and a substrate holder which is a member for holding a substrate. A cleaning method according to the present disclosure is a cleaning method for a substrate holder having electrical contacts for supplying electric power to a substrate by contacting the substrate to plate the substrate, the method including a cleaning step of cleaning the electrical contacts attached to the substrate holder with a citric acid aqueous solution.