The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2023
Filed:
Apr. 05, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Mangesh Ashok Bangar, San Jose, CA (US);
Gautam Pisharody, Newark, CA (US);
Lancelot Huang, San Jose, CA (US);
Alan L. Tso, San Jose, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Huixiong Dai, San Jose, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Srinivas D. Nemani, Sunnyvale, CA (US);
Christopher Siu Wing Ngai, Burlingame, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present disclosure generally relate to apparatus and methods for verification and re-use of process fluids. The apparatus generally includes a tool for performing lithography, and a recirculation path coupled to the tool. The recirculation path generally includes a collection unit coupled at first end to a first end of the tool, and a probe coupled at a first end to a second end of the collection unit, the probe for determining one or more characteristics of a fluid flowing from the tool. The recirculation path of the apparatus further generally includes a purification unit coupled at a first end to a third end of the collection unit, the purification unit further coupled at a second end to a second end of the probe, the purification unit for changing a characteristic of the fluid.