The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2023
Filed:
Mar. 11, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Manabu Nakagawasai, Tokyo, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); C23C 14/50 (2006.01); H01J 37/34 (2006.01); H01J 37/32 (2006.01); C23C 14/56 (2006.01); C23C 14/22 (2006.01);
U.S. Cl.
CPC ...
C23C 14/352 (2013.01); C23C 14/225 (2013.01); C23C 14/351 (2013.01); C23C 14/505 (2013.01); C23C 14/564 (2013.01); C23C 14/568 (2013.01); H01J 37/32642 (2013.01); H01J 37/34 (2013.01); H01J 37/3405 (2013.01); H01J 37/3411 (2013.01); H01J 2229/0705 (2013.01);
Abstract
A sputtering apparatus includes a base on which a substrate is mounted, an annular member disposed at an outer periphery of the base to surround a side surface and a backside of the substrate without in contact with the substrate, and an edge cover that covers an outer edge of an upper surface of the substrate mounted on the base. The annular member has a first surface facing the backside of the substrate mounted on the base with a gap, a second surface facing the side surface of the substrate mounted on the base with a gap, and a tapered surface formed at a corner portion between the first surface and the second surface.