The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2023
Filed:
Nov. 09, 2020
Disco Corporation, Tokyo, JP;
Youngsuk Kim, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A wafer processing apparatus includes a chuck table that holds a wafer with metal electrodes embedded therein, a processing unit that grinds or polishes the wafer held by the chuck table, a cassette mounting table for a cassette in which such wafers can be accommodated, a transfer unit that holds and transfers each wafer between the cassette and the chuck table, a checking unit configured to check whether or not at least one of the metal electrodes is exposed on the wafer, a notification unit that notifies that the at least one metal electrode is exposed, and a control unit that controls operations of the processing unit and the transfer unit. If the exposure of the at least one metal electrode on the wafer is detected by the checking unit, the control unit stops the processing of the wafer and the transfer of the wafer.