The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
Nov. 06, 2019
Disco Corporation, Tokyo, JP;
Tasuku Koyanagi, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A lift-off method includes a dividing step of dividing a buffer layer and an optical device layer stacked on a front side of a substrate to thereby form separate buffer layers and separate optical device layers, a transfer member bonding step of bonding a transfer member to a front side of the separate optical device layers, a buffer layer breaking step of applying a pulsed laser beam to the separate buffer layers to thereby break the separate buffer layers, and an optical device layer transferring step of transferring the separate optical device layers from the substrate to the transfer member. An energy density of each pulse of the pulsed laser beam is set to 1.0 to 5.0 mJ/mm.