The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
Aug. 23, 2019
Tokyo Electron Limited, Tokyo, JP;
Nao Akashi, Sapporo, JP;
Yuta Haga, Iwate, JP;
Hiroyuki Sato, Iwate, JP;
Motoi Okada, Sapporo, JP;
Kei Sano, Sapporo, JP;
Junya Sato, Sapporo, JP;
Takayuki Kita, Sapporo, JP;
Atsushi Suzuki, Sapporo, JP;
Kiwamu Tsukino, Sapporo, JP;
Takuro Tsutsui, Sapporo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
According to an aspect of the present disclosure, a substrate state determining apparatus includes: an image capturing unit that captures an image of a substrate placed on a stage; a learning unit that executes a machine learning using training data in which information indicating a state of the substrate is attached to the image of the substrate, so as to generate a substrate state determination model in which the image of the substrate is taken as an input and a value related to the state of the substrate corresponding to the image of the substrate is taken as an output; and a determination unit that determines the state of the substrate corresponding to the image of the substrate captured by the image capturing unit, using the substrate state determination model generated by the learning unit.